About us


    LanheTek, founded in 2020, is a leading supplier of MOCVD and CVD equipment for semiconductors.

    LanheTek has developed series of MOCVD and CVD tools on basis of four classical platforms of technologies, i.e., DR (double rotation), CS (coupled showerhead), HR (horizontal flow) and C (vertical flow with high rotation speed). These tools are widely applied for epitaxial growth of materials and devices of Indium Phosphide (InP), Gallium Arsenide (GaAs) and their alloys; Gallium Nitride (GaN) and Nitride alloys; Silicon Carbide (SiC), Gallium Oxide (Ga2O3), customized metal and 2D films of Molybdenum Disulfide (MoS2), Tungsten Diselenide (WSe2) as well as graphene.

    LanheTek's experts team supports strong innovation, engineering and service for world-class research, exploration and industrial mass-production.

Product

DR Series MOCVD Equipment

Double Rotation + Horizontal Flow

Equipment Type:

      DR600/DR600HT - 12x4", 5x(3x4"), 6x6", 8x6", 5x8"

      DR700/DR700HT - 15x4", 6x(3x4"), 8x6", 9x6", 6x8"

Material: InP, GaAs, GaN, SiC, etc.

Application: MLED, laser, sensor, power device, RF device, solar cell, etc.

CS Series MOCVD Equipment

Showerhead + Vertical Flow

Equipment Type:

      CS150/CS150HT - 6x2", 1x4", 1x6"

      CS260/CS260HT - 12x2", 3x4", 1x6", 1x8"

      CS300/CS300HT - 19x2", 5x4", 3x6", 1x8", 1x12"

Material: InP, GaAs, GaN, AlN, Ga₂O₃, Graphene, WSe₂, MoS₂, etc.

Application: laser, sensor, power device, RF device, solar cell, etc.



RH Series MOCVD Equipment

Atmospheric Pressure + Horizontal Flow

Equipment Type:

      RH100/RH100HT - 3x2", 1x4"

      RH150/RH150HT - 7x2", 1x4", 1x6"

Material: GaN, AlN, etc.

Application: Blue-green laser, power device, RF device, etc.

C Series MOCVD Equipment

High-speed Rotation + Vertical Flow

Equipment Type:

      C300/C300HT - 19x2",   6x4", 3x6", 1x8", 1x12"

      C800/C800HT - 42x4", 18x6", 8x8"

Material: InP, GaAs, GaN, AlN, etc.

Application:
 LED, MLED, laser, sensor, power device, RF device, solar cell, etc.
Contact us
Address:
No.500, Sanzao Road, Zhang Jiang Hi-Tech Park, Pudong , Shanghai, China
Phone: +86-21-58338009 ext. 8050
E-mail: sales@lanhetek.com
Postcode: 201210
Official Account